Vacuum Linear Motors

HIWIN vacuum linear motors provide a variety of models, considering the low outgassing rate of vacuum applications, and can be applied to high vacuum environments of 10-8 mbar. The exclusive magnetic shielding design can be customized to effectively avoid magnetic field interference, and ensure stability for Electron beam applications for semiconductors. HIWIN can also customize vacuum motor according to customer needs to achieve higher force density.
  •  For high vacuum applications up to 10-8mbar
  •  Customized Magnetic Shielding Function
  •  Customized cleaning and outgassing rate testing services

10-8 mbar

High Vacuum

Vacuum Linear Motors

LMC-EFC-V

LMC-EFE-V

LMC-EFF-V

LMC-EFC-V

Type Continuous force [N]Continuous current [Arms]Peak force (1s) [N]Peak current (1s) [Arms]Length of Forcer [mm]Length of stator/Dimension N [mm] Data Sheet Interface Drawing 3D Model
LMC-EFC1-V 19 1.7 150 13.6 61 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFC2-V 38 1.7 300 13.6 121 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFC3-V 57 1.7 450 13.6 181 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFC4-V 76 1.7 600 13.6 241 120mm/N=2, 180mm/N=3, 300mm/N=5

LMC-EFE-V

Type Continuous force [N]Continuous current [Arms]Peak force (1s) [N]Peak current (1s) [Arms]Length of Forcer [mm]Length of stator/Dimension N [mm] Data Sheet Interface Drawing 3D Model
LMC-EFE1-V 25 1.4 200 10.8 61 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFE2-V 50 1.4 400 10.8 121 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFE3-V 75 1.4 600 10.8 181 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFE4-V 100 1.4 800 10.8 241 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFE5-V 125 1.4 1000 10.8 301 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFE6-V 150 2.7 1200 21.7 361 120mm/N=2, 180mm/N=3, 300mm/N=5

LMC-EFF-V

Type Continuous force [N]Continuous current [Arms]Peak force (1s) [N]Peak current (1s) [Arms]Length of Forcer [mm]Length of stator/Dimension N [mm] Data Sheet Interface Drawing 3D Model
LMC-EFF1-V 39 2.9 309 22.6 61 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFF2-V 78 2.9 617 22.6 121 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFF3-V 117 2.9 926 22.6 181 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFF4-V 156 2.9 1234 22.6 241 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFF5-V 195 2.9 1543 22.6 301 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFF6-V 233 2.9 1852 22.6 361 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFF7-V 272 2.9 2160 22.6 421 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFF8-V 311 2.9 2469 22.6 481 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFF9-V 350 2.9 2777 22.6 541 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFFA-V 389 2.9 3086 22.6 601 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFFB-V 428 2.9 3394 22.6 661 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFFC-V 467 2.9 3703 22.6 721 120mm/N=2, 180mm/N=3, 300mm/N=5
LMC-EFFD-V 506 2.9 4012 22.6 781 120mm/N=2, 180mm/N=3, 300mm/N=5
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