MultiDimensional positioning stage “MD-ZT” integrates 5 DOFs including Z, Rx, Ry, Rz and Lift-Z within a height of only 90 mm. MD-ZT successfully minimize the extra load and height when installed on XY platforms. With these features, we provide competitive solutions to meet the needs of equipment upgrading.
- Nano-level positioning: Perfect for high-end inspection in SEMI industries.
- High control bandwidth: Fast response and precise motion control for high dynamic applications.
- Compact design: 40% decrease in height compare to conventional design. Provides more flexible movement agility.
- Integration of key technologies: Modularized design in software & hardware minimizes technical difficulties and cost for instrument upgrade.
±60 nm
Nano-level positioning
±6 nm
Nano positioning stability