Air bearing stage

Nano accuracy positioning stage developed for semiconductor/FPD industries and features air bearing of new generation. It is leading by using vacuum preloaded air bearing with low  consumption,  dynamic  counter  balancing  technology  and  mass compensation  algorithm, which enable accurate motion in a thousandth second, decreasing production takt time. Futher-more, friction is eliminated so that equipment reliability is increased.
Are you looking for other documents
Go to download center